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Membraneless Piezoelectric MEMS speakers based on AlN Thin Film
Citations:
5
References:
19
Abstract
This paper reports piezoelectric aluminum nitride (AlN) based microelectromechanical systems (MEMS) speakers. We introduce a novel geometry of microspeakers based on AlN to meet the requirements of modern applications such as phones, tablets, laptops, and in ear applications. We introduce the principle, design, and characterization results. The speakers were fabricated on cavity silicon on insulat...
Keywords
Sustainable Development Goals (SDG)
2022
Article
Open Access
Institution
Publisher
2-Y Citation Average
0.379
Language
Country
Membraneless Piezoelectric MEMS speakers based on AlN Thin Film
Citations:
5
References:
19
Abstract
This paper reports piezoelectric aluminum nitride (AlN) based microelectromechanical systems (MEMS) speakers. We introduce a novel geometry of microspeakers based on AlN to meet the requirements of modern applications such as phones, tablets, laptops, and in ear applications. We introduce the principle, design, and characterization results. The speakers were fabricated on cavity silicon on insulat...
Keywords
Sustainable Development Goals (SDG)
2022
Article
Open Access
Institution
Publisher
2-Y Citation Average
0.379
Language
Country